Measurement and analysis instrument manufacturer SII NanoTechnology Inc. (SIINT), a 100% subsidiary of Seiko Instruments Inc. (SII), announces the release of two probe stations, NanoNaviReal and NanoNaviReal s, equipped with RealTune, an automatic measurement parameter adjustment function.

NanoNaviReal	NanoNaviReal s

Scanning Probe Microscope is a system which enables to observe high magnification topography and to analyze physical properties by probe scanning on a sample (Probe tip radius is several nanometers equals one billionth of a meter).
Since sample can be observed and measured in liquid and air without sample preparation, SPM is widely used in the field of high function material, semiconductor, recording media, and biotechnology.

SII NanoTechnology Inc. is a leading company in the development and manufacture of SPM. SII NanoTechnology Inc. has successfully observed an atomic image using SPM in 1986 and released Japan's first scanning tunneling microscope (STM) in 1987.

Along with the miniaturization of electrical devices, for example, it becomes harder and harder to measure topography and physical property of devices at micro spot by conventional methods such as SEM, OM and stylus type surface roughness measurement tool.

Due to its high measurement precision at nanometer level, SPM is widely used as a de facto standard tool for the analysis of Si wafer and hard disk surface roughness and of thin film topograph.

On the other hand, because conventional SPM requires highly-skilled operator to set measurement parameters such as control gain, scanning speed and so on, ease of use is demanded for SPM.

NanoNaviReal and NanoNaviReal s which are equipped with RealTune, an automatic measurement parameter adjustment function, allow users to set optimal parameters.
User can select measurement units^*1 for their application, allowing easy measurement with high reliability and high repeatability.

[Key Features]

(1) Automatic Adjustment of Measurement Parameter by RealTune
Monitoring behavior between sample and probe, it enables comprehensive automatic adjustment of the parameters such as control gain, scanning speed and measurement force using control algorithms.

(2) One-Click Auto-Measurement
The operator simply prepares sample and cantilever, selects measurement conditions, and starts measuring. RealTune automatically adjusts measurement parameters, enabling high repeatability and high reliable measurement results.

[Key Specifications]

*1: Either of the following measurement unit is required to use SPM system.

Environment Control Unit E-sweep	Large Stage Unit L-trace�U	Multi-Function Unit S-image	General-purpose small unit Nanocute